Products
Product information
For Spattering Process
Our cryopumps designed for sputtering process increase tool availability by extended regeneration intervals along with increased pumping capacity.
We are proud to offer many different models of cryopumps with proven reliability, excellent performance and quality.
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Our cryopumps designed for sputtering process increase tool availability by extended regeneration intervals along with increased pumping capacity.
ULVAC CRYOGENICS INCORPORATED
■Head Office and Factory
1222-1 yabata,Chigasaki,Kanagawa,253-0085,Japan
TEL:+81-467-85-9366 FAX:+81-467-85-9356
■Kyoto Cryogenic Technology R&D Center/Kyoto Factory
140-1,Megawa,Makishima-cho,Uji,kyoto,611-0041,Japan
TEL:＋81-774-28-5595 FAX:＋81-774-20-2201
■Osaka Branch Office
Uemura Nissay Bldg.3-3-31 Miyahara,Yodogawa-Ku,Osaka,532-0003,Japan
TEL:+81-(0)6-6397-0112 FAX:+81-(0)6-6397-0126
