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Speciality Cryopumps for Sputtering Process
CRYO-U12HSP
FEATURES
- Argon capacity is twice of the standard model (U12H).
- Hydrogen pumping speed is 1.5 times of standard model (U12H)
- Extended intervals between regenerations means higher tool availability.
- Multiple connections (up to 3) can be made.
DIMENSIONS (Unit:mm)
SPECIFICATIONS
| Pumping speed (20℃) | Nitrogen | L/s | 4,100 |
| Hydrogen | 6,000 | ||
| Argon | 3,400 | ||
| Water | 9,500 | ||
| Ultimate pressure | Pa(Torr) | 10-7(10-9) | |
| Maximum throughput | Argon | Pa?L/s(Torr?L/s) | 2.0×103(15.0) |
| Hydrogen | 4.1×102(3.1) | ||
| Pumping capacity | Argon | Pa?L(Torr?L) | 4.4×108(3.3×106) |
| Hydrogen | 1.6×106(1.2×104) | ||
| Cooldown time | min(Hz) | 90/80(50/60) | |
| Mounting flange | UVG-300,10BANSI | ||
| Compressor unit | C30VR | ||
| Weight | Kg | 42 | |
*Maintenance interval : every 16,000 hours
*Travelling base is optional.
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