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MAINTENANCE AND REPLACEMENT PARTS
Inner kit, Maintenance seal kit, Maintenance bearing kit, Setting of helium gas back-filling jig, Adsorber
We are proud to offer many different models of cryopumps with proven reliability, excellent performance and quality.
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MAINTENANCE AND REPLACEMENT PARTS
Inner kit, Maintenance seal kit, Maintenance bearing kit, Setting of helium gas back-filling jig, Adsorber
ULVAC CRYOGENICS INCORPORATED
■Head Office and Factory
1222-1 yabata,Chigasaki,Kanagawa,253-0085,Japan
TEL:+81-467-85-9366 FAX:+81-467-85-9356
■Kyoto Cryogenic Technology R&D Center/Kyoto Factory
140-1,Megawa,Makishima-cho,Uji,kyoto,611-0041,Japan
TEL:＋81-774-28-5595 FAX:＋81-774-20-2201
■Osaka Branch Office
Uemura Nissay Bldg.3-3-31 Miyahara,Yodogawa-Ku,Osaka,532-0003,Japan
TEL:+81-(0)6-6397-0112 FAX:+81-(0)6-6397-0126