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[Basic Knowledge about Cryopumps 7 ]
Unit Conversion Table
1.Pressure
Pa | Torr | bar | kg/cm2 | psi | atm | |
Pa | 1 | 7.5E(-3) | 1E(-5) | 1.02E(-5) | 1.45E(-4) | 9.87E(-6) |
Torr | 133 | 1 | 1.33E(-3) | 1.36E(-3) | 1.93E(-2) | 1.32E(-3) |
bar | 1E5 | 750 | 1 | 1.02 | 14.5 | 0.987 |
kg/cm2 | 9.80E4 | 735 | 0.98 | 1 | 14.2 | 0.968 |
psi | 6.89E3 | 51.7 | 6.89E(-2) | 7.03E(-2) | 1 | 6.80E(-2) |
atm | 1.01E(-5) | 760 | 1.01 | 1.03 | 14.7 | 1 |
2.Pumping Speed
m3/s | L/s | |
m3/s | 1 | 1E(-3) |
L/s | 1E(-3) | 1 |
3.Flow Rate
Pa?m3/s | Pa?L/s | Torr?L/s | sccm | |
Pa?m3/s | 1 | 1E3 | 7.52 | 592 |
Pa?L/s | 1E(-3) | 1 | 7.52E(-3) | 0.592 |
Torr?L/s | 1.33E(-1) | 133 | 1 | 78.9 |
sccm | 1.69E(-3) | 1.69 | 1.27E(-2) | 1 |
4.Pumping capacity
Pa?m3 | Pa?L | Torr?L | L(Standard) | |
Pa?m3 | 1 | 1E3 | 7.52 | 9.87E(-3) |
Pa?L | 1E(-3) | 1 | 7.52E(-3) | 9.87E(-6) |
Torr?L | 1.33E(-1) | 133 | 1 | 1.32E(-3) |
L(Standard) | 1.01E2 | 1.01E5 | 760 | 1 |
5.Temperature
K | ℃+273.15 |
°F | (9/5)℃+32 |