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CRYOPUMPS (STANDARD) 16" TYPE
CRYO-U16
FEATURES
- Suitable for medium and large-size equipments.
- Suitable for batch type large deposition systems.
- Resistant to thermal load.
DIMENSIONS (Unit:mm)
SPECIFICATIONS
| Pumping speeds(20degrees) | Nitrogen | L/s | 5,000 |
| Hydrogen | 10,000 | ||
| Argon | 4,200 | ||
| Water | 16,000 | ||
| Ultimate pressure | Pa(Torr) | 10-7(10-9) | |
| Maximum throughput | Argon | Pa?L/s(Torr?L/s) | 1.4×103(11.0) |
| Hydrogen | 4.1×102(3.1) | ||
| Pumping capacity | Argon | Pa?L(Torr?L) | 4.3×108(3.3×106) |
| Hydrogen | 2.4×106(1.8×104) | ||
| Cooldown time | min(Hz) | 110/100(50/60) | |
| Mounting flange | UVG-400 | ||
| Compressor unit | C30VR | ||
| Weight of cryopump | kg | 61.0 | |
Wide Variety of Models, ranging from 6" diameter to 30" diameter.
*Maintenance interval: every 16,000 hours
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